signal/raiseTrack rounds
SeedRobotics & hardware · Eindhoven

Invisix raises €20m seed round for soft X-ray chip metrology

The ASML spin-out, backed by Hitachi Ventures, imec.xpand and an unnamed tier-one chipmaker, wants to measure buried 3D structures inside chips without destroying them.

s/rFunding deskEurope · 2 min read

Invisix, an Eindhoven-based company that builds soft X-ray tools for measuring computer chips, has raised an oversubscribed seed round of €20m (about $23m). The announcement, datelined May 2026, was reported by tech.eu and Bits&Chips on 1 June 2026.

Hitachi Ventures, Transition Ventures, imec.xpand, Doosan Investment and an unnamed tier-one semiconductor manufacturer invested. The company did not name a lead investor or disclose a valuation.

“Semiconductor manufacturers can’t build what they can’t see.”Christina Porter, Co-founder and CEO, Invisix

What Invisix does

As chips become more three-dimensional, many of the features that decide how well a device works are buried under other layers, where conventional optical inspection tools cannot see them. Invisix is building metrology systems that use soft X-rays to measure that internal structure without destroying the chip.

Porter said the industry needs a new generation of metrology tools that can look inside what she called incredibly complex miniature skyscrapers without destroying them. Existing methods for measuring buried features are slower and often destructive, according to the company.

Its systems are based on high harmonic generation, a way of producing short-wavelength light linked to the 2023 Nobel Prize in Physics. Invisix combines it with its own reconstruction algorithms and machine learning to build 3D pictures of devices, and says the design is meant to work at the throughput of high-volume manufacturing.

The technology was developed inside ASML for more than a decade before the spin-out, the company said. Invisix licensed a technology package from ASML's soft X-ray work, collaborates with Professor Anne L'Huillier of Lund University, and in 2023 published results with Intel and imec on features of gate-all-around transistors.

Who is behind it

The company was founded by Christina Porter, its chief executive, and Sietse van der Post, its chief technology officer. Both are PhD physicists who previously worked at ASML. Roald Dogge joined as chief operating officer from NTS. The company's website says it was established in 2025. It has not disclosed how many people it employs.

Porter said the ASML history gave the company a degree of technical de-risking that is unusual for a seed-stage hardware business, and a faster path to deployment for customers.

What the money is for

Invisix said it would use the money to grow its team, speed up development of its first shippable system and run customer demonstrations at a new cleanroom in Eindhoven.

Seibold said Invisix combined a technology platform backed by a decade of ASML development with proven results with industry partners and a system design suited to high-volume manufacturing. tech.eu reported that the technology had been validated through collaborations with Intel and imec. Invisix did not name the tier-one chipmaker among its investors or say whether any manufacturer had ordered a system.

Wolfgang Seibold, partner and chief investment officer at Hitachi Ventures, said metrology increasingly limits yield and ramp speed as chip architectures become more three-dimensional. Clara Ricard, a partner at Transition Ventures, called Invisix one of Europe's most promising semiconductor companies. The company did not report any earlier outside funding.

Company website: invisix.com